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| POSITIONING |
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Open Loop |
Closed Loop(GridTrac) |
| Repeatability |
12 microns (0.0005") nominal |
12 microns (0.0005") nominal |
| Accuracy |
50 microns (0.002") nominal |
25 microns (0.001") nominal |
| Move Resolution |
2.5 microns(.0001") |
0.5 microns(.00002") |
| Setting Time |
≤ 150 msec |
≤ 20 msec |
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| DEMENSIONS |
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RW-05 |
RW-161 |
| Height |
1,467 mm (57.8") |
1,679 mm (66.1") |
| Width |
1,302 mm (51.2") |
1,924 mm (75.8") |
| Depth |
1,019 mm (40.1") |
1,344 mm (52.9") |
| Drive Surface |
1,106 mm x 626 mm (43.5"x24.6") |
1,596 mm x 1,016 mm (62.8"x40") |
| Shipping Weight |
455 kg(1,000 Ibs.) |
1,100 kg (2.420 Ibs.) |
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| MODULES |
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RW6210 |
TM6200 |
TM6200GT |
CM6200 |
| Acceleration |
0.8 G |
1.0 G |
1.0 G |
1.0 G |
| Payload |
1.5 kg (3.3 Ibs.) |
1.0 kg |
1.0 kg |
N/A |
| Z Travel |
100 mm (3.9") |
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| Z Resolution |
5 microns(0.0002") |
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| Theta Range |
360°(±180°) |
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| Theta Resolution |
0.006° |
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| UTILITY REQUIREMENTS |
Pneumatic |
1 scfm/head at 80 psig |
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Electrical |
10 amps at 208 VAC, single phase |
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▶ 정보 업데이트 : 2008-06-18
▶ 이 정보는 제조사의 정책에 의해 변경될 수 있습니다.
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